Products

Semiconductor Plastic Spares and Consumables

Semplastics designs and manufactures plastic spares and consumables for a broad range of wafer fab processing equipment.

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Plasma Etch Spares

Semplastics manufactures components from plasma etch-resistant thermoplastic materials for enhanced performance and reduced cost of ownership. Two examples are given below:

Upper and Lower Ardel Rings for TEL Unity Systems

Lower Ring, P/N 1810-431189-12 (S-9219)

S-9219

Upper Ring, P/N 1810-431194-12 (S-9220)

S-9220

Vespel Clamp Rings for P5000 Etch Systems


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