Products
Semiconductor Plastic Spares and Consumables
Semplastics designs and manufactures plastic spares and consumables for a broad range of wafer fab processing equipment.
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Scrubbers / Cleans Spares
Semplastics has developed a broad array of high-quality, cost-effective replacement chuck pins for DNS 80A/80B, 60A/60B scrubbers and photo tracks, as well as DNS AS2000 post CMP scrubbers. These parts include vacuum chucks, wafer pins, wafer guides, and magnetic assemblies.The current part listings can be found in the following table:
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
|---|---|---|---|---|
 |
2-9P-00082 | Chuck Pin Assembly |
S-8929 |
Multiple |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-9P-00083 | Magnet Chuck Pin Assembly |
S-8928 |
Multiple |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-F2-33159 | Developer Chuck |
S-8126 |
CF PEEK |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-F2-81977 | Coater Chuck 80mm |
S-8127 |
CF PEEK |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-F3-82177 | Wafer Guide Assembly |
S-9105 |
PCTFE |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-F4-81459 | Reverser Pin |
S-9034 |
Teflon |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-F4-82408 | Wafer Support |
S-8991 |
PCTFE or Polyimide |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-F4-82409 | Wafer Support |
S-9248 |
PCTFE or Polyimide |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-F4-85922 | Pin, M6 for Spin Unit |
S-9147 |
White DELRIN |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-F4-93622 | Wafer Guide |
S-8317B |
CF PEEK or Polyimide |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-J3-85424 | Wafer Tabs / Set |
S-9247 |
PCTFE |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-J3-85861 | Scrubber, Wafer Guide, 200mm |
S-9218 |
PCTFE or Vespel |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-J4-35990 | Pin, M8 for Spin Unit |
S-9149 |
White DELRIN |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-J4-80330 | Reverse Gripper |
S-8486 |
PCTFE |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-J4-80685 | Teflon Cap |
S-9062 |
Teflon |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-J4-87394 | Pin, Black for Spin Unit |
S-9148 |
Black DERLIN |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-J4-8B064 | Pin, 200mm Diam. Wafer |
S-8927 |
CF PEEK |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-J4-8B067 | Support Tabs |
S-8415CFP |
CF PEEK |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-J4-8L077 | PEEK Pin |
S-9072 |
SS and CF PEEK Cap |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
2-JU-8U944 | Teflon Ring |
S-9063 |
Teflon |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
5-F4-10173 | PFA Split Tube |
S-8465 |
PFA |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
7-T3-836121 | Sensor Roller |
S-9293 |
PEEK |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
5-F4-72614 | TBC Pin Chuck |
S-9294 |
PCTFE |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
7-T3-80168 | Chuck Roller |
S-9295 |
PEEK |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
7-F3-41361 | DTC Pin Chuck |
S-9296 |
PEEK |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
5-F4-72615 | TBC Moving Pin |
S-9297 |
PCTFE |
| Photo | OEM Part Number | Description | Semplastics Part Number | Material |
 |
7-F3-41362 | DTC Moving Pin |
S-9298 |
PEEK |