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Semiconductor Plastic Spares and Consumables

Semplastics designs and manufactures plastic spares and consumables for a broad range of wafer fab processing equipment.

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Photolithography / Tracks

For DNS 80A/80B, 60A/60B photolithographic track spares, the current part listings can be found at the following table.

Other phototrack spares include precision machined polypropylene IC cups for TEL ACT 6 and CLEAN TRACK ACT 8 systems. Both the standard 3-piece and the redesigned 4-piece IC cup upgrade are available. The redesigned (4-piece) IC cup upgrade provides greatly improved exhaust flow. The benefits are listed below:

  • Improved resist uniformity, most notably near the edge of the wafer
  • Dramatic reduction in topside particles
  • Significant reduction in backside particles, which lowers solvent consumption and improves yields
  • Precise resist thickness profile results in better process control  
3-Piece IC Cup Assembly, Polypropylene
3-Piece IC Cup Assembly, Polypropylene
4-Piece IC Cup Upgrade (Assembly), Polypropylene
4-Piece IC Cup Upgrade (Assembly), Polypropylene

 

Bottom Cup from 3-Piece and 4-Piece IC Cup Upgrade, Polypropylene
Bottom Cup from 3-Piece and 4-Piece IC Cup Upgrade, Polypropylene

 

2-Piece Upper Cup from 4-Piece IC Cup Assembly
2-Piece Upper Cup from 4-Piece IC Cup Assembly

 

We also specialize in machining TEL TRACK ACT 8, and Lithius pincettes and fingers from high-performance wear-resistant material such as Vespel to reduce cost of ownership and improve up-time.

image24 image14

 

Other high-performance plastic materials are available for improved lifetime of the wafer support fingers for the following equipment: Mark 8, CLEAN TRACK ACT 8, and Lithius.

  • Injection molded polypropylene cups are also available for FSI litho tracks.  
Upper Cup
Upper Cup
Middle Cup
Middle Cup
Lower Cup
Lower Cup

 

Contact us today for further details or request a quote.