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Semiconductor Plastic Spares and Consumables

Semplastics designs and manufactures plastic spares and consumables for a broad range of wafer fab processing equipment.

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Photolithography / Tracks

For DNS 80A/80B, 60A/60B photolithographic track spares, the current part listings can be found at the following table.

Other phototrack spares include precision machined polypropylene IC cups for TEL ACT 6 and CLEAN TRACK ACT 8 systems. Both the standard 3-piece and the redesigned 4-piece IC cup upgrade are available. The redesigned (4-piece) IC cup upgrade provides greatly improved exhaust flow. The benefits are listed below:

Improved resist uniformity, most notably near the edge of the wafer
Dramatic reduction in topside particles
Significant reduction in backside particles, which lowers solvent consumption and improves yields
Precise resist thickness profile results in better process control

3-Piece IC Cup Assembly, Polypropylene

4-Piece IC Cup Upgrade (Assembly), Polypropylene

Bottom Cup from 3-Piece and 4-Piece IC Cup Upgrade, Polypropylene

2-Piece Upper Cup from 4-Piece IC Cup Assembly

We also specialize in machining TEL TRACK ACT 8, and Lithius pincettes and fingers from high-performance wear-resistant material such as Vespel to reduce cost of ownership and improve up-time.

Other high-performance plastic materials are available for improved lifetime of the wafer support fingers for the following equipment: Mark 8, CLEAN TRACK ACT 8, and Lithius.

Injection molded polypropylene cups are also available for FSI litho tracks.